A Method to Characterize Coating Uniformity Using Confocal Laser Scanning Microscope

Characterization of Coating Microstructure Using Laser Scanning Confocal Microscopy

A Digital ULSI Inspection Method Using Parallel Scanning Confocal Microscope

In ULSI fabrication, the design rule scaled up to 0.25um and the complex multiple layer structure prevent from applying the traditional optical microscope of which resolution is about 0.4um. Considering the situation, we have developed a ULSI inspection system based on the scanning parallel confocal microscope. In this paper, we present the feature of the computer aided parallel scanning confoc...

A custom confocal and two-photon digital laser scanning microscope.

We describe a custom one-photon (confocal) and two-photon all-digital (photon counting) laser scanning microscope. The confocal component uses two avalanche photodiodes (APDs) as the fluorescence detector to achieve high sensitivity and to overcome the limited photon counting rate of a single APD ( approximately 5 MHz). The confocal component is approximately nine times more efficient than our ...

A New Multichannel Spectral Imaging Laser Scanning Confocal Microscope

We have developed a new multichannel spectral imaging laser scanning confocal microscope for effective detection of multiple fluorescent labeling in the research of biological tissues. In this paper, the design and key technologies of the system are introduced. Representative results on confocal imaging, 3-dimensional sectioning imaging, and spectral imaging are demonstrated. The results indica...

Spatial Intensity Correction of Fluorescent Confocal Laser Scanning Microscope Images

This paper addresses the problem of intensity correction of fluorescent confocal laser scanning microscope (CLSM) images. CLSM images are frequently used in medical domain for obtaining 3D information about specimen structures by imaging a set of 2D cross sections and performing 3D volume reconstruction afterwards. However, the images of optical sections acquired from fluorescent CLSM demonstra...